Pick a step to read the tooling, chemicals and procedure straight from the SOP.·4-inch Si → NbTiN → patterning → 3×3 blocks → measurement
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Oct 13, 2026, 01:10 AM
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Oct 13, 2026
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Oct 20, 2026
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33 wafers · 6 blocks · 24 cooldowns
filters
Narrow the tree and register by glyph state
temperature
route progress
measurement outcome
deposition length
branching map
Every wafer, block and chip on one scrolling canvas
Scroll or use the scroll bars to move around, drag to pan, ctrl/⌘ + scroll or pinch to zoom. Fit width / fit page auto-size the canvas as you unfurl nodes. Click a wafer to unfurl its blocks, then a block for its chip field.
pdf export
Print the map and legends cleanly
Landscape by default, with margin-safe page edges so nothing is clipped by the printer's no-print border. The map is flattened to its full size and scaled to the page width.
orientation
page size
margins
content
Printable width 1027 px · choose “Save as PDF” in the print dialog and keep scale at 100%.
status key
What each node colour means
Every node on the map carries a status pill and a matching left edge. The colour tracks route progress and reads the same for wafers, blocks and chips.
- not started — waiting in queueNot started37
- in progress — on a tool nowIn progress · partial chips1
- coated — film stack depositedCoated NbTiN · Coated Al · a-Si/NbN coated19
- etched / patternedEtching Done0
- measured — data takenMeasured · measured chips0
- route completeDiced · Finalized6
The thin bar on a node's left edge still shows thermal history (see the glyph key below); the pill on the right shows the status colour above.
stage clock
Days between stages
Each node carries the days it has sat at its current stage, coloured by age. Open a node's row to see the gap between each dated thermal / deposition change.
- moving (≤ 14 d)
- slowing (15–45 d)
- stalled (> 45 d)
- no dates recorded in the sheet
0 of 23 dated lots have been stalled for over 45 days.
glyph key
How to read a wafer or block mark
shape
- disc with flat = 4-inch wafer, ticks = SD / LD deposition
- square = 3×3 block diced from that wafer
ring colour — thermal history
- room temperature
- annealed
- annealed 650 °C
sweep — route progress
- 15% of the route done
- 45% of the route done
- 80% of the route done
- route complete
centre — measurement outcome
- measured
- partially measured
- not measured