Nanofabrication process tracker

QuantumCore Inc. · NbTiN device run · NEMO cleanroom

wafers in fab

17/24

blocks in fab

11/15

Pick a step to read the tooling, chemicals and procedure straight from the SOP.·4-inch Si → NbTiN → patterning → 3×3 blocks → measurement

filters

Narrow the tree and register by glyph state

24/24 wafers · 15/15 blocks

temperature

route progress

measurement outcome

deposition length

glyph key

How to read a wafer or block mark

shape

  • legend sampledisc with flat = 4-inch wafer, ticks = SD / LD deposition
  • legend samplesquare = 3×3 block diced from that wafer

ring colour — thermal history

  • legend sampleroom temperature
  • legend sampleannealed
  • legend sampleannealed 650 °C

sweep — route progress

  • legend sample15% of the route done
  • legend sample45% of the route done
  • legend sample80% of the route done
  • legend sampleroute complete

centre — measurement outcome

  • legend samplemeasured
  • legend samplepartially measured
  • legend samplenot measured