Step entry forms | QuantumCore nanofab tracker

Pick a step to read the tooling, chemicals and procedure straight from the SOP.·4-inch Si → NbTiN → patterning → 3×3 blocks → measurement

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Oct 13, 2026, 01:10 AM

reporting week

Oct 13, 2026

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Oct 20, 2026

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33 wafers · 6 blocks · 24 cooldowns

log work

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StepWaferDate doneYour name

step parameters

NbTiN thickness (nm)TargetDeposition lengthAnnealAnneal temperature (°C)Base pressure before run (Torr)Wafer source

Notes

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step 2

Tool PLASSYS-sputter · NEMO “Deposition”

PPE

Double glove for holder handling

Key parameters

Materials & chemicals

Procedure

1Vent the loadlock, take out the hot holder, mount the wafer with the rods and re-tighten.
2Check the holder back is flat, close the loadlock and pump.
3Build the recipe in the process editor; “?” fields are the variables you must set.
4Save, Run Recipe, point Data Logging at Log Files → QuantumCore, then Execute.
5Skip the first subprocess at 2e-6 mBar. Never pause on a heating or deposition step.
6Watch the holder transfer and the plasma at etch and deposition start.
7Unload to a clean black wafer box, park the holder in the desiccator, pump, log off.
8Transfer the recipe out through the file-transfer system and delete it from the tool PC.

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