Pick a step to read the tooling, chemicals and procedure straight from the SOP.·4-inch Si → NbTiN → patterning → 3×3 blocks → measurement
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Oct 13, 2026, 01:10 AM
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Oct 13, 2026
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Oct 20, 2026
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33 wafers · 6 blocks · 24 cooldowns
cooldown report
Cooldowns per fridge and per wafer block
Every cooldown as one row — date, fridge, film thickness, line length and outcome — with a link straight to the full logbook entry in the measurement log.
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7 fridges · 24 cooldown rows
ARS
1 cooldown · 0 with gain · 0 deadSep 28, 2026 → Sep 28, 2026| date | blocks | thickness | line length | outcome | logbook |
|---|---|---|---|---|---|
| Sep 28, 2026 | WH-B3-20G3 | 17 nm | 120 mm | Partial / features only | open row |
He Dewar
1 cooldown · 0 with gain · 0 deadSep 15, 2026 → Sep 15, 2026| date | blocks | thickness | line length | outcome | logbook |
|---|---|---|---|---|---|
| Sep 15, 2026 | W0D-B1-20G2U4 | 17 nm | 100 mm | Partial / features only | open row |
RAC
5 cooldowns · 0 with gain · 3 deadJul 15, 2026 → Sep 1, 2026| date | blocks | thickness | line length | outcome | logbook |
|---|---|---|---|---|---|
| Sep 1, 2026 | W0D-B1-20G2U4 | 17 nm | 50 mm | Partial / features only | open row |
| Aug 25, 2026 | WG-B2-8G1 | 8 nm | 100 mm | Dead chip | open row |
| Aug 11, 2026 | WG-B2-8G1 | 8 nm | 50 mm | Dead chip | open row |
| Jul 24, 2026 | W0D-B1-20G1 | 17 nm | 50 mm | Partial / features only | open row |
| Jul 15, 2026 | W0A-B1-20G2 | 17 nm | 150 mm | Dead chip | open row |
Tremblant
4 cooldowns · 0 with gain · 0 deadOct 27, 2025 → Feb 23, 2026ZPC1
8 cooldowns · 3 with gain · 0 deadMar 22, 2026 → Sep 21, 2026| date | blocks | thickness | line length | outcome | logbook |
|---|---|---|---|---|---|
| Sep 21, 2026 | WH-B3-20G3 | 17 nm | 100 / 120 mm | Partial / features only | open row |
| Sep 4, 2026 | WG-B2-8G1, W0D-B2-20G0U4 | 17 nm | 20 / 100 mm | Partial / features only | open row |
| Aug 27, 2026 | WG-B2-8G1, WF-2D-20G2 | 8 nm | 100 mm | Partial / features only | open row |
| Aug 9, 2026 | WG-B2-8G1, WF-2D-20G2 | 8 nm | 50 mm | Gain observed | open row |
| Jul 20, 2026 | W0C-B2-20G1U1 | 20 nm | 50 mm | Gain observed | open row |
| Jun 24, 2026 | W0C-B2-20G1U1, W0A-B1-20G1U2 | 20 nm | 50 / 175 mm | Gain observed | open row |
| Apr 13, 2026 | W0D-B1-20G0U3 | 17 nm | 50 mm | Partial / features only | open row |
| Mar 22, 2026 | W0D-B1-20G0U3 | 17 nm | 50 mm | Partial / features only | open row |
ZPC1, ZPC2
1 cooldown · 0 with gain · 0 deadMay 1, 2026 → May 1, 2026| date | blocks | thickness | line length | outcome | logbook |
|---|---|---|---|---|---|
| May 1, 2026 | W0C-B3-20G1U2 | 20 nm | 50 / 100 / 150 / 175 mm | Partial / features only | open row |